MEMS-based thermoelectric infrared sensors: A review
Sign Up to like & getrecommendations! Published in 2017 at "Frontiers of Mechanical Engineering"
DOI: 10.1007/s11465-017-0441-2
Abstract: In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared (IR) sensors have received considerable attention because of the advances in micromachining technology. This paper presents a review of MEMS-based thermoelectric IR sensors. The first part… read more here.
Keywords: thermoelectric infrared; based thermoelectric; review mems; mems based ... See more keywords
Operational characteristics of an MEMS-based micro oscillating heat pipe
Sign Up to like & getrecommendations! Published in 2017 at "Applied Thermal Engineering"
DOI: 10.1016/j.applthermaleng.2017.06.109
Abstract: Abstract The flow characteristics and thermal performance of an MEMS-based micro oscillating heat pipe (micro-OHP) were experimentally investigated using dielectric liquid HFE-7100 as working fluid. The micro-OHP was integrated on a silicon wafer with trapezoidal… read more here.
Keywords: oscillating heat; heat pipe; mems based; based micro ... See more keywords
MEMS-based fabrication of high-performance inductors with back hollow structure and ferromagnetic film
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2016.10.005
Abstract: Abstract The development of novel on-chip device techniques is attracting more and more interest because of the increasing demand for communication electronics, wearable devices and Internet of Things (IoT) with features of low power consumption,… read more here.
Keywords: hollow structure; mems based; back hollow; film ... See more keywords
The Performance of EDXS at Elevated Sample Temperatures Using a MEMS-Based In Situ TEM Heating System.
Sign Up to like & getrecommendations! Published in 2021 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2021.113461
Abstract: Since the development of MEMS heating holders, dynamic in-situ experiments at elevated temperatures may be complemented by X-ray spectrometry for chemical analysis. Although the amount of IR radiation is small when compared to furnace holders,… read more here.
Keywords: system; influence; situ heating; sample temperatures ... See more keywords
Full-range birefringence control with piezoelectric MEMS-based metasurfaces.
Sign Up to like & getrecommendations! Published in 2022 at "Nature communications"
DOI: 10.1038/s41467-022-29798-0
Abstract: Dynamic polarization control is crucial for emerging highly integrated photonic systems with diverse metasurfaces being explored for its realization, but efficient, fast, and broadband operation remains a cumbersome challenge. While efficient optical metasurfaces (OMSs) involving… read more here.
Keywords: full range; range birefringence; mems based; control ... See more keywords
Improvement in capacitive performances of efficient micro electro mechanical system (MEMS) based power inverter
Sign Up to like & getrecommendations! Published in 2018 at "Cogent Engineering"
DOI: 10.1080/23311916.2018.1455407
Abstract: Abstract In this paper different electrostatic interdigitated comb designs for the new concept of MEMS based DC–AC capacitive power inverter for the solar photovoltaic applications has been compared and tested on the basis of different… read more here.
Keywords: inverter; interdigitated comb; power inverter; power ... See more keywords
Design and simulation study of a MEMS-based three-dimensional combined hydrophone for UUV applications
Sign Up to like & getrecommendations! Published in 2025 at "Sensor Review"
DOI: 10.1108/sr-11-2024-0921
Abstract: Purpose This paper aims to present the design of a micro-electro-mechanical system (MEMS)-based three-dimensional combined vector hydrophone tailored for unmanned underwater vehicles (UUVs). The proposed design addresses the left-right ambiguity inherent in conventional MEMS hydrophones… read more here.
Keywords: dimensional combined; hydrophone; based three; three dimensional ... See more keywords
Sleep-Mask-Type Pulse Wave and Respiration Rate Sensor Using a MEMS-Based Differential Pressure Sensing Element
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2024.3403522
Abstract: Noninvasive sensors have been widely used to measure pulse and respiratory waves, which are the primary measurement targets in sleep monitoring. Conventional noninvasive biometric sensing devices, including smartwatches, require the use of multiple sensing elements… read more here.
Keywords: respiratory waves; sleep mask; sensor; pulse respiratory ... See more keywords
Development of a MEMS-Based Resonant Airflow Sensor for Apnea Detection Using Time-of-Flight Technique
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2025.3529880
Abstract: This article introduces a novel micro electromechanical system (MEMS)-based resonant airflow sensor designed specifically for respiration monitoring in application such as obstructive sleep apnea (OSA). The sensor operates based on the time-of-flight (ToF) technique and… read more here.
Keywords: time; based resonant; sensor; flight ... See more keywords
Impact of By-Products From Metal Welding on the Temperature Measurement of MEMS-Based Thermoelectric Infrared Sensors
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2025.3564062
Abstract: In metal welding processes, micro-electromechanical system (MEMS)-based thermoelectric infrared sensors are widely employed for real-time temperature monitoring to ensure weld quality. However, welding by-products, particularly fumes and molten metal spatter particles, introduce significant measurement errors… read more here.
Keywords: temperature; based thermoelectric; metal welding; thermoelectric infrared ... See more keywords
$Ku$ -Band Channel Aggregation Waveguide Filters by RF MEMS-Based Detuning
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Microwave Theory and Techniques"
DOI: 10.1109/tmtt.2019.2950241
Abstract: By switching high $Q$ -factor 3-D waveguide bandpass filters with planar radio frequency micro-electromechanical system (RF MEMS)-based elements, a channel aggregation technique is developed in this article. These planar elements play the role of generating… read more here.
Keywords: tex math; mems based; channel aggregation; aggregation ... See more keywords