Effect of buckling on the thermal response of microelectromechanical beam resonators
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DOI: 10.1063/1.4993740
Abstract: We have investigated the thermal response of the doubly clamped microelectromechanical (MEMS) beam resonators as a function of an input heating power. When a small amount of heat ( read more here.
Keywords: thermal response; frequency; beam resonators; mems beam ... See more keywords