Low temperature epoxy bonding for RF MEMS capacitive switch
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4186-6
Abstract: Packaging is one of the most critical tasks for MEMS devices. Unlike solid state devices, MEMS structures involves moving structures which needs to be protected from outer environment ensuring free movement of the structure. In… read more here.
Keywords: low temperature; epoxy bonding; temperature epoxy; switch ... See more keywords
Electrical properties of nanostructured SiN films for MEMS capacitive switches
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/0960-1317/27/1/014001
Abstract: The electrical properties of gold nanorods nanostructured silicon nitride films are comprehensively investigated with the aid of metal–insulator–metal capacitors and RF MEMS capacitive switches. Different nanorod diameters and densities were grown on the bottom electrode… read more here.
Keywords: sin films; properties nanostructured; mems capacitive; capacitive switches ... See more keywords
Low voltage driven RF MEMS capacitive switch using reinforcement for reduced buckling
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa4ea1
Abstract: Variation in actuation voltage for RF MEMS switches is observed as a result of stress-generated buckling of MEMS structures. Large voltage driven RF-MEMS switches are a major concern in space bound communication applications. In this… read more here.
Keywords: voltage; low voltage; voltage driven; switch ... See more keywords
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch
Sign Up to like & getrecommendations! Published in 2024 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/ad2308
Abstract: This article presents a reconfigurable and compact power divider design that utilizes a combination of defect structures in the ground plane (DGS) and capacitance loading using a unique RF MEMS switch on the sapphire substrate.… read more here.
Keywords: power divider; capacitive switch; power; mems capacitive ... See more keywords
On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2019.2962068
Abstract: A method that allows the investigation of discharge transport mechanism in dielectric films used in MEMS capacitive switches or MIM capacitors or even bare dielectric films is presented. The method is based on monitoring the… read more here.
Keywords: mems capacitive; dielectric film; capacitive switches; film ... See more keywords
MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2018.2837143
Abstract: This paper reports on the design and implementation of high performance MEMS microphones. The main parameters defining microphone performance, i.e., sensitivity, acoustic overload level, and signal-to-noise ratio, have been extracted from an acoustical–mechanical–electrical model of… read more here.
Keywords: microphones acoustical; electrical hidden; capacitive microphones; hidden thermal ... See more keywords
A Review of MEMS Capacitive Microphones
Sign Up to like & getrecommendations! Published in 2020 at "Micromachines"
DOI: 10.3390/mi11050484
Abstract: This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These… read more here.
Keywords: capacitive microphones; review mems; mems capacitive;
High Frequency MEMS Capacitive Mirror for Space Applications
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14010158
Abstract: Free space optics laser communication using modulating retroreflectors (MR) is a challenging application for an active mirror, due to the high frequencies (>100 kHz) required to enable sufficient data transfer. Micro Electromechanical (MEMS) mirrors are… read more here.
Keywords: high frequency; mems capacitive; mirror; space ... See more keywords