An SOI-based post-fabrication process for compliant MEMS devices
Sign Up to like & getrecommendations! Published in 2024 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/ad2f4b
Abstract: Fabricating compliant microelectromechanical system (MEMS) devices is challenging because they are easily damaged during fabrication. This paper presents a fabrication process based on the silicon-on-insulator (SOI) wafer for compliant MEMS devices. In the fabrication process,… read more here.
Keywords: mems devices; fabrication; soi based; compliant mems ... See more keywords
A review of research on RF MEMS for metaverse interactions
Sign Up to like & getrecommendations! Published in 2024 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/ad63b2
Abstract: Metaverse as a comprehensive integration of multiple digital technologies of the new generation, enables human beings to bring unprecedented immersive experiences with the support of virtual reality, augmented reality, blockchain, digital twin, Artificial Intelligence, haptic… read more here.
Keywords: mems devices; mems metaverse; review research; metaverse interactions ... See more keywords
A Proactive Plastic Deformation Method for Fine-Tuning of Metal-Based MEMS Devices After Fabrication
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2018.2871937
Abstract: An innovative plastic deformation method is proposed to tune metal-based MEMS devices after fabrication. The plastic deformation is a well-known failure mechanism in MEMS devices, which includes a phenomenon that the devices do not return… read more here.
Keywords: mems devices; devices fabrication; deformation; deformation method ... See more keywords
Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2017.2694845
Abstract: Test structures were developed to visualize the progress of the dry release of an MEMS device fabricated by deep reactive ion etching (DRIE). Because of the high aspect ratio of DRIE MEMS devices, the undercut… read more here.
Keywords: mems devices; structure; test; test structures ... See more keywords
Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review
Sign Up to like & getrecommendations! Published in 2025 at "Biomolecules"
DOI: 10.3390/biom15060898
Abstract: Designing and manufacturing devices at the micro- and nanoscales offers significant advantages, including high precision, quick response times, high energy density ratios, and low production costs. These benefits have driven extensive research in micro-electromechanical systems… read more here.
Keywords: mems devices; biomedical mems; trends biomedical; systems mems ... See more keywords
Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review
Sign Up to like & getrecommendations! Published in 2020 at "Membranes"
DOI: 10.3390/membranes10110361
Abstract: The evolution of engineering applications is increasingly shifting towards the embedded nature, resulting in low-cost solutions, micro/nano dimensional and actuators being exploited as fundamental components to connect the physical nature of information with the abstract… read more here.
Keywords: mems devices; curvature dependent; membrane; electrostatic field ... See more keywords
Ceramics for Microelectromechanical Systems Applications: A Review
Sign Up to like & getrecommendations! Published in 2024 at "Micromachines"
DOI: 10.3390/mi15101244
Abstract: A comprehensive review of the application of different ceramics for MEMS devices is presented. Main ceramics materials used for MEMS systems and devices including alumina, zirconia, aluminum Nitride, Silicon Nitride, and LTCC are introduced. Conventional… read more here.
Keywords: mems devices; systems applications; ceramics microelectromechanical; applications review ... See more keywords