A Proactive Plastic Deformation Method for Fine-Tuning of Metal-Based MEMS Devices After Fabrication
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2018.2871937
Abstract: An innovative plastic deformation method is proposed to tune metal-based MEMS devices after fabrication. The plastic deformation is a well-known failure mechanism in MEMS devices, which includes a phenomenon that the devices do not return… read more here.
Keywords: mems devices; devices fabrication; deformation; deformation method ... See more keywords
Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2017.2694845
Abstract: Test structures were developed to visualize the progress of the dry release of an MEMS device fabricated by deep reactive ion etching (DRIE). Because of the high aspect ratio of DRIE MEMS devices, the undercut… read more here.
Keywords: mems devices; structure; test; test structures ... See more keywords
Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review
Sign Up to like & getrecommendations! Published in 2020 at "Membranes"
DOI: 10.3390/membranes10110361
Abstract: The evolution of engineering applications is increasingly shifting towards the embedded nature, resulting in low-cost solutions, micro/nano dimensional and actuators being exploited as fundamental components to connect the physical nature of information with the abstract… read more here.
Keywords: mems devices; curvature dependent; membrane; electrostatic field ... See more keywords