MEMS Fabry–Pérot Interferometers With Double Membrane Mirrors for Improved Mirror Parallelism
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DOI: 10.1109/jmems.2018.2852839
Abstract: This paper presents surface micromachined MEMS Fabry–Pérot interferometers (FPIs) with two released membrane mirrors. Fabrication of such FPIs with large-area membrane reflectors of up to 5 mm in diameter for first-order operation in the near… read more here.
Keywords: membrane mirrors; mems fabry; fabry rot; rot interferometers ... See more keywords