MEMS Flow Sensor Using Suspended Graphene Diaphragm With Microhole Arrays
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2018.2874231
Abstract: This letter reports a miniature flow sensor using a suspended composite membrane of graphene and silicon nitride containing an array of microscale through-holes. As a fluid flow passes through these microholes, the graphene layer of… read more here.
Keywords: using suspended; sensor using; mems flow; graphene ... See more keywords
Fully Integrated Bidirectional CMOS-MEMS Flow Sensor With Low Power Pulse Operation
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2019.2891784
Abstract: Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas flow. Our SoC features a very low-noise instrumentation amplifier… read more here.
Keywords: flow sensor; mems flow; cmos mems; low power ... See more keywords