High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform.
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DOI: 10.1364/ol.44.003777
Abstract: We report the design and characterization of high-frequency, resonant acousto-optic modulators (AOMs) in a micro-electro-mechanical systems (MEMS) foundry process. The doubly resonant cavity design, with short (L ∼10.5 μm) acoustic and optical cavity lengths, allows us to… read more here.
Keywords: mems foundry; optic modulators; high frequency; acousto optic ... See more keywords