Effect of misalignment on the dynamic characteristic of MEMS gas bearing considering rarefaction effect
Sign Up to like & getrecommendations! Published in 2019 at "Tribology International"
DOI: 10.1016/j.triboint.2019.06.015
Abstract: Abstract In this paper, the dynamic characteristics of MEMS gas bearing are investigated. Angular misalignment and rarefaction effect are introduced into the lubrication equation based on FK model. The partial derivative method is adopted to… read more here.
Keywords: effect; gas bearing; mems gas; rarefaction effect ... See more keywords
A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications
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DOI: 10.3390/s23115087
Abstract: Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel… read more here.
Keywords: novel packaging; gas; gas sensors; packaging ... See more keywords