Effect of misalignment on the dynamic characteristic of MEMS gas bearing considering rarefaction effect
Sign Up to like & getrecommendations! Published in 2019 at "Tribology International"
DOI: 10.1016/j.triboint.2019.06.015
Abstract: Abstract In this paper, the dynamic characteristics of MEMS gas bearing are investigated. Angular misalignment and rarefaction effect are introduced into the lubrication equation based on FK model. The partial derivative method is adopted to… read more here.
Keywords: effect; gas bearing; mems gas; rarefaction effect ... See more keywords
Highly Selective MEMS Gas Sensor Based on Temperature-Programmed Desorption Technology.
Sign Up to like & getrecommendations! Published in 2025 at "ACS sensors"
DOI: 10.1021/acssensors.5c01413
Abstract: Aiming at the issue of poor selectivity in metal oxide gas sensors, a novel MEMS gas sensor structure was designed, comprising an adsorption unit and a sensing unit. Based on this design, a gas-sensing method… read more here.
Keywords: temperature; gas sensor; mems gas; gas ... See more keywords
MEMS Gas Sensors Based on In2O3-Decorated SnO2 Nanosheets for Aniline Detection
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2024.3441052
Abstract: Aniline monitoring holds significant importance across various industries. In this study, we propose a microelectromechanical systems (MEMS) gas sensor employing In2O3-decorated SnO2 nanosheets for aniline detection. Ultrathin nanomaterials were prepared via a facile hydrothermal procedure.… read more here.
Keywords: sno2 nanosheets; mems gas; nanosheets aniline; in2o3 decorated ... See more keywords
A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications
Sign Up to like & getrecommendations! Published in 2023 at "Sensors"
DOI: 10.3390/s23115087
Abstract: Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel… read more here.
Keywords: novel packaging; gas; gas sensors; packaging ... See more keywords