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Published in 2020 at "Microsystem Technologies"
DOI: 10.1007/s00542-020-04840-7
Abstract: This paper presents a design optimization approach for a single-drive, 3-axis Microelectromechanical Systems (MEMS) gyroscope. Mathematical models for springs are obtained and a simplified structure for single-drive, 3-axis MEMS gyroscope is proposed. In the proposed…
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Keywords:
single drive;
drive axis;
mathrm;
mathrm mathrm ... See more keywords
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Published in 2023 at "Physica Scripta"
DOI: 10.1088/1402-4896/accf47
Abstract: The angular momentum carries crucial information on the physical nature of quantum matter. We propose and analyze MEMS gyroscope techniques suitable for measuring the angular momentum of mesoscopic quantum matter specimens at low temperatures. We…
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Keywords:
matter;
angular momentum;
mems gyroscope;
momentum sensitivity ... See more keywords
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Published in 2019 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2019.2921607
Abstract: In this paper, we examine the origins of bias instability in three-axis, mode-matched MEMS gyroscopes. Reducing this drift phenomenon is crucial for highly accurate navigation in applications, such as automated driving or indoor localization. We…
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Keywords:
instability;
bias instability;
mems gyroscope;
three axis ... See more keywords
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Published in 2017 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2016.2636563
Abstract: This paper analyzes the root causes of zero-rate output (ZRO) in microelectromechanical system (MEMS) vibratory gyroscopes. ZRO is one of the major challenges for high-performance gyroscopes. The knowledge of its causes is important to minimize…
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Keywords:
zero rate;
rate output;
root cause;
mems gyroscope ... See more keywords
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Published in 2018 at "IEEE Journal of Solid-State Circuits"
DOI: 10.1109/jssc.2018.2844285
Abstract: This paper describes a split-mode tuning fork MEMS gyroscope with CMOS readout circuit. The gyroscope achieves 0.008°/ $\surd \text{h}$ angle random walk (ARW) and 0.08°/h bias instability (BI). The noise and phase requirements of the…
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Keywords:
cmos readout;
split mode;
readout circuit;
circuit ... See more keywords
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Published in 2020 at "Mathematical Problems in Engineering"
DOI: 10.1155/2020/3019152
Abstract: The microelectromechanical system (MEMS) gyroscope has low measurement accuracy and large output noise; the useful signal is often submerged in the noise. A new denoising method of interval empirical mode decomposition (IEMD) is proposed. Firstly,…
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Keywords:
mode;
denoising method;
empirical mode;
interval empirical ... See more keywords
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Published in 2019 at "Micromachines"
DOI: 10.3390/mi10090608
Abstract: The large random errors in Micro-Electro-Mechanical System (MEMS) gyros are one of the major factors that affect the precision of inertial navigation systems. Based on the indoor inertial navigation system, an improved wavelet threshold de-noising…
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Keywords:
network;
error;
method;
wavelet ... See more keywords
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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13081255
Abstract: The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving…
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Keywords:
symmetric silicon;
mems gyroscope;
mode matching;
review symmetric ... See more keywords
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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101569
Abstract: The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The periodic…
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Keywords:
inclination;
effect;
inclination effect;
mems gyroscope ... See more keywords