A low TCR MEMS heater developed for cryogenic application
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DOI: 10.1063/5.0148408
Abstract: A microheater with a small temperature coefficient of resistance (TCR) at liquid hydrogen temperature was designed and fabricated by microfabrication technology. The NiCr heater annealed in N2 at 250 °C achieved the smallest TCR. The crystal… read more here.
Keywords: developed cryogenic; low tcr; mems heater; tcr mems ... See more keywords