A High-Performance 9.5% Scandium-Doped Aluminum Nitride Piezoelectric MEMS Hydrophone With Honeycomb Structure
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2021.3120806
Abstract: This letter presents a high-performance scandium-doped aluminum nitride (ScxAl1-xN, x = 9.5%) piezoelectric MEMS hydrophone. The doping of Sc increases the piezoelectric constants of the piezoelectric sensing layer and hence results in better receive sensitivity… read more here.
Keywords: tex math; mems hydrophone; piezoelectric mems; inline formula ... See more keywords
Low-Cost, Tiny-Sized MEMS Hydrophone Sensor for Water Pipeline Leak Detection
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2018.2874583
Abstract: In this paper, we present an experimental investigation of a water pipeline leak detection system based on a low-cost, tiny-sized hydrophone sensor fabricated using the microelectromechanical system (MEMS) technologies. A 10 × 10 element arrayed… read more here.
Keywords: tex math; inline formula; mems hydrophone; water ... See more keywords
A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14030654
Abstract: In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an… read more here.
Keywords: aln based; high sensitivity; sensitivity aln; pipeline ... See more keywords