Articles with "mems implementation" as a keyword



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Structural Optimization and MEMS Implementation of the NV Center Phonon Piezoelectric Device

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Published in 2022 at "Micromachines"

DOI: 10.3390/mi13101628

Abstract: The nitrogen-vacancy (NV) center of the diamond has attracted widespread attention because of its high sensitivity in quantum precision measurement. The phonon piezoelectric device of the NV center is designed on the basis of the… read more here.

Keywords: mems implementation; phonon piezoelectric; center; phonon ... See more keywords