Study on a High Performance MEMS Infrared Thermopile Detector
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DOI: 10.3390/mi10120877
Abstract: This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into… read more here.
Keywords: detector; study high; mems infrared; performance mems ... See more keywords