Design and characterization of a silicon MEMS microvalve for proportional flow control based on electrostatic bending actuators
Sign Up to like & getrecommendations! Published in 2024 at "Microsystem Technologies"
DOI: 10.1007/s00542-024-05684-1
Abstract: We designed a MEMS microvalve based on the nanoscopic electrostatic drive (NED) technology (Nat Commun 6:10078, 2015). NED actuators, electrostatically controlled bending beams, are implemented in a clamped-clamped configuration. A normally open plunger valve was… read more here.
Keywords: mems microvalve; control; silicon mems; design characterization ... See more keywords