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Published in 2022 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2021.3065608
Abstract: This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the…
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Keywords:
resonant mems;
mems mirror;
vibration;
mems scanning ... See more keywords
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1
Published in 2022 at "Biomedical optics express"
DOI: 10.1364/boe.447558
Abstract: A handheld confocal microscope using a rapid MEMS scanning mirror facilitates real-time optical biopsy for simple cancer diagnosis. Here we report a handheld confocal microscope catheter using high definition and high frame rate (HDHF) Lissajous…
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Keywords:
frame rate;
mems mirror;
microscopy;
microscope ... See more keywords
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Published in 2022 at "Optics express"
DOI: 10.1364/oe.476198
Abstract: We previously designed a dual-axis piezoelectric MEMS mirror with a low crosstalk gimbal structure, which is utilized as the key device for further research for laser beam scanning. This paper mainly focuses on studying the…
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Keywords:
mems mirror;
resolution;
piezoelectric mems;
adjustable lissajous ... See more keywords