Towards Synchronous Mode of Multiple Independently Controlled MEMS Mirrors
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DOI: 10.1016/j.ifacol.2019.11.645
Abstract: Abstract Light Detection and Ranging (LiDAR) will be one of the key enablers of smart mobility. Smart mobility creates a fully connected urban environment with graceful benefits for the city such as quality of life,… read more here.
Keywords: mode multiple; controlled mems; mems mirrors; towards synchronous ... See more keywords
MEMS Test Bench and its Uncertainty Analysis for Evaluation of MEMS Mirrors
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DOI: 10.1016/j.ifacol.2019.11.648
Abstract: Abstract This paper proposes a MEMS test bench to ensure highly accurate and precise angle measurements for evaluation of multiple MEMS mirrors and analyzes its measurement uncertainty. The MEMS test bench includes a position sensitive… read more here.
Keywords: mems test; mems mirrors; uncertainty analysis; test bench ... See more keywords
AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
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DOI: 10.3390/mi13091550
Abstract: This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of… read more here.
Keywords: alscn piezoelectric; mirror; field view; mems mirrors ... See more keywords
Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing
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DOI: 10.3390/mi14010040
Abstract: Here, we introduce ultrafast tunable MEMS mirrors consisting of a miniature circular mirrored membrane, which can be electrostatically actuated to change the mirror curvature at unprecedented speeds. The central deflection zone is a close approximation… read more here.
Keywords: mems mirrors; optical focusing; membrane; deformable mems ... See more keywords
Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR
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DOI: 10.3390/mi14051019
Abstract: This paper presents the fabrication and characterization of a biaxial MEMS (MicroElectroMechanical System) scanner based on PZT (Lead Zirconate Titanate) which incorporates a low-absorption dielectric multilayer coating, i.e., a Bragg reflector. These 2 mm square… read more here.
Keywords: low absorption; long range; power; mems mirrors ... See more keywords