MEMS Optical Fiber F–P Hydrophone Based on Corrugated PET Diaphragm
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DOI: 10.1109/tim.2023.3235444
Abstract: In this article, a micro-electro-mechanical system (MEMS) optical fiber Fabry–Perot (F–P) hydrophone based on corrugated polyethylene terephthalate (PET) diaphragms was proposed, fabricated, and measured. Corrugations of different depths were introduced into the PET by simple… read more here.
Keywords: mems optical; corrugated pet; based corrugated; optical fiber ... See more keywords