An Investigation on the Effects of Contact in MEMS Oscillators
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DOI: 10.1109/jmems.2018.2875338
Abstract: We investigate the effects of contact in MEMS oscillators by fabricating, testing, and simulating a simple device featuring bilinear stiffness. When the shuttle oscillation exceeds a given threshold, contact with an elastic beam is activated.… read more here.
Keywords: mems oscillators; effects contact; investigation effects; contact mems ... See more keywords