Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/acd78c
Abstract: Temperature-dominated drift is generally the main error source for high-performance micromachined resonant accelerometers (MRAs) due to inherent thermal stress effect of resonator structure and die-attach process. This paper describes the design and experimental evaluation of… read more here.
Keywords: temperature compensation; resonant accelerometers; compensation; temperature ... See more keywords
MEMS Resonant Mass Sensor With Integrated Optical Manipulation
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Transactions on Nanotechnology"
DOI: 10.1109/tnano.2018.2819939
Abstract: We investigate optical manipulation of particles in fluid as a viable method to achieve better experimental fidelity and extend the application of integrated-fluidic resonant-mass sensing. Fluctuations in sample position or trajectory can lead to measurement… read more here.
Keywords: mass sensor; mass; optical manipulation; mems resonant ... See more keywords