Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3536-0
Abstract: The main objective of this work is the assessment of a calibration method for piezoelectric MEMS resonators for simultaneous density and viscosity sensing. A device designed to resonate with the 2nd order out-of-plane modal vibration… read more here.
Keywords: viscosity; density viscosity; mems resonators; calibration ... See more keywords
Synchronization of uncertain MEMS resonators via adaptive time-varying terminal sliding mode control
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4088-7
Abstract: The main goal of this study addresses the synchronization between two MEMS resonators with cubic and quintic mechanical stiffness under the existence of system uncertainties and external disturbances. The synchronization is obtained by using a… read more here.
Keywords: time varying; time; adaptive time; terminal sliding ... See more keywords
On the response of MEMS resonators under generic electrostatic loadings: theoretical analysis
Sign Up to like & getrecommendations! Published in 2019 at "Nonlinear Dynamics"
DOI: 10.1007/s11071-019-05024-3
Abstract: We present an investigation of the dynamic behavior of an electrostatically actuated resonant structure, resonator, under the simultaneous excitation of primary and subharmonic resonances. A comprehensive analytical solution is obtained via the method of Multiple… read more here.
Keywords: response; excitation; generic electrostatic; response mems ... See more keywords
Reduced order modelling of the non-linear stiffness in MEMS resonators
Sign Up to like & getrecommendations! Published in 2019 at "International Journal of Non-Linear Mechanics"
DOI: 10.1016/j.ijnonlinmec.2019.07.002
Abstract: Abstract We propose a simplified numerical technique to quantify the effects of non-linear stiffness in MEMS resonators and we validate our approach on a clamped–clamped beam, a softening Disk Ring Gyroscope (DRG) and a shallow… read more here.
Keywords: non linear; reduced order; linear stiffness; stiffness mems ... See more keywords
Actuation Dependency of Frequency Tuning in MEMS Resonators
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.2975077
Abstract: This letter shows that active tuning of MEMS resonators through temperature is highly dependent on the actuation mechanism used, and demonstrates the adverse effects of using substrate conductive heating characterization results to predict device’s performance… read more here.
Keywords: resonant frequency; frequency shift; tuning mems; frequency ... See more keywords
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2021.3077633
Abstract: Silicon MEMS resonators are increasingly being adopted for applications in timing and frequency control, as well as precision sensing. It is well established that a key limitation to performance is associated with sensitivity to environmental… read more here.
Keywords: silicon mems; frequency fluctuations; frequency; temperature pressure ... See more keywords
Investigation on Quasi Lamb Wave Modes in AlN-on-Si MEMS Resonators.
Sign Up to like & getrecommendations! Published in 2023 at "IEEE transactions on ultrasonics, ferroelectrics, and frequency control"
DOI: 10.1109/tuffc.2023.3257327
Abstract: Aluminum nitride (AlN)-on-Si MEMS resonators operating in Lamb wave modes have found wide applications for physical sensing and frequency generation. Due to the inherent layered structure, the strain distributions of Lamb wave modes become distorted… read more here.
Keywords: mems resonators; aln mems; lamb wave; mode ... See more keywords
Two-dimensional measurement of resonance in MEMS resonators using stroboscopic differential interference contrast microscopy.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.460769
Abstract: We report the two-dimensional (2D) measurement of resonance in MEMS resonators using stroboscopic differential interference contrast (DIC) microscopy, for the investigation of the linear and nonlinear oscillations of MEMS resonators. The DIC microscopy measures the… read more here.
Keywords: mems resonators; contrast; microscopy; interference ... See more keywords
Concepts and Key Technologies of Microelectromechanical Systems Resonators
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13122195
Abstract: In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality… read more here.
Keywords: mems resonators; technologies microelectromechanical; microelectromechanical systems; systems resonators ... See more keywords