LAUSR

MEMS Slow-Wave CPW Phase Shifter for mm-Wave Applications

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1 Published in 2020 at "Journal of Infrared, Millimeter, and Terahertz Waves"

DOI: 10.1007/s10762-020-00731-0

Abstract: MEMS-based phase shifters show the best performance in terms of figure of merit, but their footprints are usually large and it is difficult to achieve several bits. This paper demonstrates a miniaturized phase shifter based… read more here.

Keywords: phase; phase shifter; wave cpw; mems slow ... See more keywords