Articles with "mems solid" as a keyword



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Research on MEMS Solid-State Fuse Logic Control Chip Based on Electrical Explosion Effect

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Published in 2023 at "Micromachines"

DOI: 10.3390/mi14030695

Abstract: A microelectromechanical systems (MEMS) solid-state logic control chip with three layers—diversion layer, control layer, and substrate layer—is designed to satisfy fuse miniaturization and integration requirements. A mathematical model is established according to the heat conduction… read more here.

Keywords: control chip; fuse; layer; control ... See more keywords