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Published in 2023 at "Micromachines"
DOI: 10.3390/mi14030695
Abstract: A microelectromechanical systems (MEMS) solid-state logic control chip with three layers—diversion layer, control layer, and substrate layer—is designed to satisfy fuse miniaturization and integration requirements. A mathematical model is established according to the heat conduction…
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Keywords:
control chip;
fuse;
layer;
control ... See more keywords