Optimization and development of the RF MEMS structures for low voltage, high isolation and low stress
Sign Up to like & getrecommendations! Published in 2019 at "Analog Integrated Circuits and Signal Processing"
DOI: 10.1007/s10470-019-01549-0
Abstract: MEMS capacitive switches have longer lifetimes compared to other types of metal-to-metal switches, and when placed on the membrane on the transmission line, they can easily return to the up-state due to a dielectric layer.… read more here.
Keywords: voltage; mems structures; optimization development; development mems ... See more keywords
A first passage based model for probabilistic fracture of polycrystalline silicon MEMS structures
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DOI: 10.1016/j.jmps.2016.11.007
Abstract: Experiments have shown that the failure loads of Microelectromechanical Systems (MEMS) devices usually exhibit a considerable level of variability, which is believed to be caused by the random material strength and the geometry-induced random stress… read more here.
Keywords: strength; mems structures; poly mems; model ... See more keywords
Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2021.3083935
Abstract: This paper presents a zeroth and first order perturbative analysis of prestressed electrostatic actuated Microelectromechanical systems (MEMS). Perturbation theory is used to calculate the deflection profile of various MEMS structures, from which the pull-in voltage… read more here.
Keywords: prestressed electrostatic; deflection; voltage; pull voltage ... See more keywords