Contact resistance and lifecycle of a single- and multiple-contact MEMS switch
Sign Up to like & getrecommendations! Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4279-2
Abstract: MEMS switches have a wide range of potential applications in radio frequency and microwave systems due to promising characteristics. However, these devices are still not widespread because of reliability issues. The weak point of the… read more here.
Keywords: contact; contact resistance; multiple contact; beam ... See more keywords
Design and development of miniaturized low voltage triangular RF MEMS switch for phased array application
Sign Up to like & getrecommendations! Published in 2018 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2018.02.210
Abstract: Abstract Nowadays, Micro-Electro-Mechanical System (MEMS) is widely used for various applications ranging from switches to sensors. The central idea of this work is to design and analyze metal to metal contact based miniaturized low voltage… read more here.
Keywords: low voltage; design; voltage triangular; miniaturized low ... See more keywords
Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation
Sign Up to like & getrecommendations! Published in 2017 at "Solid-state Electronics"
DOI: 10.1016/j.sse.2016.10.004
Abstract: Abstract In this paper, we have developed an electrostatic driven capacitive RF MEMS switch. The actuation voltage is applied to the actuation electrodes, and the DC voltage is isolated from the signal line and RF… read more here.
Keywords: voltage; capacitive mems; mems switch; insertion loss ... See more keywords
Plasma-Based Power Limitation for Highly Linear MEMS Switch Protection and Isolation Enhancement
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Access"
DOI: 10.1109/access.2020.3024760
Abstract: A novel hybrid approach integrating a MEMS switch with a gas discharge tube plasma cell to enhance switch survivability and isolation, especially at high incident power levels, is demonstrated. The theory of operation is discussed… read more here.
Keywords: plasma based; power; based power; isolation ... See more keywords
An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch
Sign Up to like & getrecommendations! Published in 2024 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2024.3377279
Abstract: This paper reports a novel bi-stable structure for a radio frequency micro-electro-mechanical system (RF MEMS) switch. The structure is activated by an in-plane electrostatic actuator and adopts the Inertial Generated Timing Sequence (IGTS) method to… read more here.
Keywords: mems switch; simple pulse; signal; zero power ... See more keywords
A Single-Chip Wafer-Level Packaged SR-Crossbar RF MEMS Switch Matrix
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2024.3403550
Abstract: This letter proposes a wafer-level packaged (WLP) single-chip sequential rotation Crossbar (SR-Crossbar) RF MEMS switch matrix, which has been fabricated and measured. Optimizations are conducted on switch units, including electrically connected seal ring design, DC-RF… read more here.
Keywords: matrix; crossbar mems; mems switch; switch matrix ... See more keywords
A Hybrid RF MEMS Switch Actuated by the Combination of Bidirectional Thermal Actuations and Electrostatic Holding
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Microwave Theory and Techniques"
DOI: 10.1109/tmtt.2020.3003553
Abstract: Radio frequency microelectro-mechanical system (RF MEMS) switches have received attention due to their higher performances at high frequencies compared with semiconductor-based switches. However, most of the previous MEMS switches used electrostatic actuation, which requires a… read more here.
Keywords: actuation; bidirectional thermal; electrostatic holding; hybrid mems ... See more keywords
Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas
Sign Up to like & getrecommendations! Published in 2018 at "International Journal of Antennas and Propagation"
DOI: 10.1155/2018/4517848
Abstract: This paper presents a fully inkjet-printed flexible MEMS switch for phased-array antennas. The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines.… read more here.
Keywords: inkjet printed; phased array; flexible mems; printed flexible ... See more keywords
Nonvolatile Silicon Photonic MEMS Switch Based on Centrally-Clamped Stepped Bistable Mechanical Beams
Sign Up to like & getrecommendations! Published in 2024 at "Photonics Research"
DOI: 10.1364/prj.533773
Abstract: High-performance photonic switches are essential for large-scale optical routing for AI large models and Internet of things. Realizing nonvolatility can further reduce power consumption and expand application scenarios. We propose a nonvolatile 2*2 silicon photonic… read more here.
Keywords: mems switch; silicon photonic; centrally clamped; clamped stepped ... See more keywords
Novel High Isolation and High Capacitance Ratio RF MEMS Switch: Design, Analysis and Performance Verification
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13050646
Abstract: In this paper, a novel high isolation and high-capacitance-ratio radio-frequency micro-electromechanical systems (RF MEMS) switch working at Ka-band is designed, fabricated, measured and analyzed. The proposed RF MEMS switch mainly consists of a MEMS metallic… read more here.
Keywords: mems switch; high capacitance; capacitance ratio; isolation ... See more keywords