Articles with "mems technologies" as a keyword



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TiO2/airgap-based polarizing beam splitter: design, simulation, and fabrication based on MEMS technologies

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Published in 2020 at "Optics and Lasers in Engineering"

DOI: 10.1016/j.optlaseng.2020.106110

Abstract: Abstract In this paper, we introduce a new thin-film polarizing beam splitter (PBS) based on air as a layer with a low refractive index (L) and titanium dioxide (TiO2) as a material with a high… read more here.

Keywords: pbs; mems technologies; polarizing beam; beam splitter ... See more keywords