MEMS Test Bench and its Uncertainty Analysis for Evaluation of MEMS Mirrors
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DOI: 10.1016/j.ifacol.2019.11.648
Abstract: Abstract This paper proposes a MEMS test bench to ensure highly accurate and precise angle measurements for evaluation of multiple MEMS mirrors and analyzes its measurement uncertainty. The MEMS test bench includes a position sensitive… read more here.
Keywords: mems test; mems mirrors; uncertainty analysis; test bench ... See more keywords