A Highly Responsive MEMS Thermometer Based on TETF AlN-on-Si Resonator Pair
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2025.3561264
Abstract: In this article, we report a MEMS thermometer comprised of two triple-ended-tuning-fork (TETF) AlN-on-Si resonators, which use the difference in their resonant frequencies (i.e., beat frequency) as the output metric for temperature sensing. To improve… read more here.
Keywords: tetf aln; resonant frequencies; difference; mems thermometer ... See more keywords