Piezoelectricity and biocompatibility of flexible ScxAl(1-x)N thin films for compliant MEMS transducers.
Sign Up to like & getrecommendations! Published in 2020 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.0c00552
Abstract: There is huge research activity in the development of flexible and biocompatible piezoelectric materials for next generation compliant Micro Electro-Mechanical Systems (MEMS) transducers to be exploited in wearable devices and implants. This work reports for… read more here.
Keywords: mems transducers; biocompatibility flexible; flexible scxal; piezoelectricity biocompatibility ... See more keywords
Mode localized MEMS transducers with voltage-controlled linear coupling
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa6652
Abstract: Recent studies have demonstrated mode localized resonant micro-electro-mechanical systems (MEMS) sensing devices with orders of magnitude improvement in sensitivity. Avoided crossings or eigenvalue veering is the physical mechanism exploited to achieve the enhancement in sensitivity… read more here.
Keywords: linear coupling; mems transducers; mode; localized mems ... See more keywords
Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14040847
Abstract: In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety… read more here.
Keywords: recent trends; trends structures; transducers audio; structures interfaces ... See more keywords