Analysis of the vulnerability of MEMS tuning fork gyroscope during the gun launch
Sign Up to like & getrecommendations! Published in 2020 at "Microelectronics Reliability"
DOI: 10.1016/j.microrel.2020.113619
Abstract: Abstract Micro-electromechanical systems (MEMS) gyroscope is fragile under mechanical impact. Especially, MEMS tuning fork gyroscope with movable structures, such as oscillating frames and folding beams, is susceptible to failure during the gun launch. However, the… read more here.
Keywords: gyroscope; fork gyroscope; analysis; gun launch ... See more keywords
Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13020172
Abstract: This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as… read more here.
Keywords: optimization novel; novel mems; design optimization; mems tuning ... See more keywords