Macro-model extraction and system-level simulation of a thermopile-based MEMS vacuum sensor
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DOI: 10.1088/1361-6439/ada61d
Abstract: Thermopile-based microelectromechanical system (MEMS) vacuum sensors are key component for vacuum monitoring, and they need be integrated with readout circuit to realize wide application. To decrease the time and cost of integrated system development cycle,… read more here.
Keywords: system; mems vacuum; simulation; thermopile based ... See more keywords