Advanced optical nanolithography by enhanced transmission through bull’s eye nanostructured meta-mask
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DOI: 10.1515/nanoph-2023-0145
Abstract: Abstract Plasmonic optical nanolithography using extraordinary optical transmission through a metallic nanohole mask has been actively applied to the high-resolution fabrication of nanostructures over a large area. Although there have been studies on improving the… read more here.
Keywords: optical nanolithography; nanolithography; bull eye; meta mask ... See more keywords