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Published in 2022 at "Nanotechnology"
DOI: 10.1088/1361-6528/ac5eeb
Abstract: Nanoimprint technology has the advantages of low cost, high precision, high fidelity and high yield. The metal nanoparticle fluid is non-Newtonian fluid, which is used as the imprint transfer medium to realize high fidelity of…
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Keywords:
lithography;
microwave sintering;
interconnect wires;
metal interconnect ... See more keywords
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Published in 2023 at "Micromachines"
DOI: 10.3390/mi14020475
Abstract: This study clarifies the conditions for the bridging and conduction of a gap on a metal interconnect using copper microparticles dispersed with silicon oil. An AC voltage applied to a metal interconnect with a gap…
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Keywords:
metal interconnect;
copper microparticles;
copper;
voltage ... See more keywords