Multilevel Operation in Scaled Back-End-of-Line Ferroelectric FETs With a Metal Interlayer
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DOI: 10.1109/access.2025.3561255
Abstract: Multi-level operation, conventionally obtained in ferroelectric devices thanks to a domain-dependent inhomogeneous polarization, poses a big challenge for highly-scaled ferroelectric devices, where the number of ferroelectric domains is drastically reduced. In this work, we study… read more here.
Keywords: back end; metal interlayer; operation; end line ... See more keywords