The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process
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DOI: 10.3390/mi16030353
Abstract: In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally designed to enhance… read more here.
Keywords: piezo actuated; process; aerosol deposition; metal mems ... See more keywords