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Published in 2022 at "Advanced Materials"
DOI: 10.1002/adma.202208965
Abstract: The increasing resistance of copper (Cu) interconnects for decreasing dimensions is a major challenge in continued downscaling of integrated circuits beyond the 7 nm technology node as it leads to unacceptable signal delays and power…
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Keywords:
nanowire interconnect;
mop nanowire;
metal mop;
topological metal ... See more keywords