Carbon-metal vibrating nanomembranes for high frequency microresonators
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DOI: 10.1016/j.diamond.2017.12.005
Abstract: Abstract A new process to reproducibly manufacture high frequency microresonators based on few nanometer thick Ni/a-C/Pt nanomembranes is presented. An AFM in tapping mode is then used to characterize the devices under electrostatic actuation, which… read more here.
Keywords: frequency microresonators; high frequency; frequency; vibrating nanomembranes ... See more keywords