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Published in 2018 at "Nano letters"
DOI: 10.1021/acs.nanolett.7b05042
Abstract: The fabrication of metallic electromagnetic meta-atoms on a soft microstructured polymer scaffold using a MEMS-based stencil lithography technique is demonstrated. Using this technique, complex metasurfaces that are generally impossible to fabricate with traditional photolithographic techniques…
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Keywords:
tunable infrared;
metasurface soft;
polymer;
polymer scaffold ... See more keywords