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Published in 2022 at "ACS photonics"
DOI: 10.1021/acsphotonics.2c00563
Abstract: Optical metasurfaces rely on subwavelength scale nanostructures, which puts significant constraints on nanofabrication accuracies. These constraints are becoming increasingly important, as metasurfaces are maturing toward real applications that require the fabrication of very large area…
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Keywords:
analysis metasurfaces;
structures always;
perfect structures;
robustness analysis ... See more keywords