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Published in 2022 at "Nano letters"
DOI: 10.1021/acs.nanolett.1c03705
Abstract: Scanning probe lithography (SPL) as a maskless approach with a low tool price can pattern a variety of materials at a nanometer or even atomic resolution. However, the throughput of conventional SPLs is extremely low…
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Keywords:
probe nanolithography;
per second;
scanning probe;
meters per ... See more keywords