Articles with "meters per" as a keyword



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Surfing Scanning Probe Nanolithography at Meters Per Second.

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Published in 2022 at "Nano letters"

DOI: 10.1021/acs.nanolett.1c03705

Abstract: Scanning probe lithography (SPL) as a maskless approach with a low tool price can pattern a variety of materials at a nanometer or even atomic resolution. However, the throughput of conventional SPLs is extremely low… read more here.

Keywords: probe nanolithography; per second; scanning probe; meters per ... See more keywords