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Published in 2022 at "Optics letters"
DOI: 10.1364/ol.474923
Abstract: Phase measurement deflectometry (PMD) is an excellent method for high-precision optical surface measurement; through the simple system structure, accuracy comparable to that of interference methods can be realized. The key of PMD is to solve…
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Keywords:
system;
accuracy;
deflectometry;
pmd ... See more keywords