Assessing the Oxidative Degradation of N-Methylpyrrolidone (NMP) in Microelectronic Fabrication Processes by Using a Multiplatform Analytical Approach
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DOI: 10.1155/2020/8265054
Abstract: During the construction of recording head devices, corrosion of metal features and subsequent deposition of corrosion by-products have been observed. Previous studies have determined that the use of N-methylpyrrolidone (NMP) may be a contributing factor.… read more here.
Keywords: analytical approach; fabrication; methylpyrrolidone nmp; multiplatform analytical ... See more keywords