A Review of Optical Metrology Techniques for Advanced Manufacturing Applications
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DOI: 10.3390/mi16111224
Abstract: Advanced manufacturing places stringent demands on measurement technologies, requiring ultra-high precision, non-contact operation, high throughput, and real-time adaptability. Optical metrology, with its distinct advantages, has become a key enabler in this context. This paper reviews… read more here.
Keywords: optical metrology; metrology techniques; metrology; advanced manufacturing ... See more keywords