Sign Up to like & get
recommendations!
1
Published in 2018 at "Silicon"
DOI: 10.1007/s12633-018-9882-4
Abstract: Effect of swift heavy ions (SHI) on low-k SiO2 thin films has been investigated. SiO2 thin films were deposited on pre-cleaned p-Si substrate by using sol-gel spin coating technique. Further, deposited films were annealed at…
read more here.
Keywords:
200 mev;
thin films;
sio2 thin;
fluence ... See more keywords
Sign Up to like & get
recommendations!
1
Published in 2019 at "Indian Journal of Physics"
DOI: 10.1007/s12648-019-01427-5
Abstract: Swift Heavy Ion (SHI) beam irradiation has been used as an experimental technique to modify the material properties through the interaction of the ion beam with the target material. In this work, the properties of…
read more here.
Keywords:
ag15 ion;
thin films;
ion;
mev ag15 ... See more keywords