Self-oriented growth of (020) MgSiO3-orthopyroxene and (002) α-Mg2SiO4 films using metal-organic chemical vapor deposition
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DOI: 10.1016/j.ceramint.2019.03.212
Abstract: Abstract We demonstrated metal-organic chemical vapor deposition of single-phase MgSiO3-orthopyroxene (-opx) and α-Mg2SiO4 films, and α-Mg2SiO4–MgO composite films with self-oriented growth on a polycrystalline AlN substrate using Mg acetylacetonate and tetraethyl orthosilicate precursors. We obtained… read more here.
Keywords: organic chemical; mgsio3; mg2sio4; mg2sio4 films ... See more keywords