Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators
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DOI: 10.3390/mi13081202
Abstract: This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs. The device includes two cooperating silicon plate resonators with… read more here.
Keywords: planar micro; device; conveyor; micro conveyor ... See more keywords