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Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3378-9
Abstract: This paper proposes an analysis and optimization of new micro-displacement sensor for a compliant microgripper. This gripper is embedded with strain gauges at the flexure hinges to become a displacement sensor in the range of…
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Keywords:
displacement sensor;
frequency;
displacement;
micro displacement ... See more keywords
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Published in 2019 at "Optik"
DOI: 10.1016/j.ijleo.2019.03.009
Abstract: Abstract An optical fiber sensor based on balloon-like interferometer and fiber Bragg grating (FBG) for simultaneous measurement of micro-displacement and temperature has been presented and experimentally investigated. The single-mode fiber (SMF) with coating stripped is…
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Keywords:
micro displacement;
interferometer;
balloon like;
temperature ... See more keywords
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Published in 2024 at "Applied Physics Letters"
DOI: 10.1063/5.0221186
Abstract: In-plane micro-displacement measurement is a critical requirement in many engineering fields. In this work, we present a measurement system based on pixelated metasurface to achieve high-precision, absolute in-plane micro-displacement measurement within limited measurement space. By…
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Keywords:
micro displacement;
pixelated metasurface;
displacement;
measurement ... See more keywords
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Published in 2017 at "Journal of Modern Optics"
DOI: 10.1080/09500340.2017.1310313
Abstract: Abstract Multiple self-mixing (MSM) interferometry, a high-precision and effective method for measuring micro-displacement, is proposed in this paper. First, a triangular wave is used to drive an electro-optic modulator for the phase modulation of MSM…
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Keywords:
self mixing;
interferometry;
interference;
micro displacement ... See more keywords
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Published in 2021 at "Smart Materials and Structures"
DOI: 10.1088/1361-665x/abe63c
Abstract: A novel magnetoresistance material based on magnetorheological fluid (MRF) was developed for applications in micro-displacement sensor. The MRF samples were fabricated by dispersing carbonyl iron particles (CIP) into a magnetic ion liquid (MIL) composed of…
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Keywords:
based magnetorheological;
micro displacement;
magnetorheological fluid;
displacement sensor ... See more keywords
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Published in 2025 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2025.3581273
Abstract: The multiple disturbances of piezoelectric micro-displacement scanning stage (MDSS) (e.g., hysteresis nonlinearity, measurement disturbance, and parameter uncertainties) exist in combination. Aiming at disturbances that mainly affect motion accuracy and coupling property of disturbances, this article…
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Keywords:
multiple disturbances;
micro displacement;
disturbance;
disturbance observer ... See more keywords
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Published in 2022 at "Applied optics"
DOI: 10.1364/ao.471712
Abstract: Sensors based on irregularly shaped bent optical fiber devices have attracted considerable interest in many applications. However, the effective interference length and bent radius of the irregular shape fiber have not been given accurately. Here…
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Keywords:
ultra sensitive;
micro displacement;
bent;
shaped bent ... See more keywords
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Published in 2023 at "Optics express"
DOI: 10.1364/oe.481514
Abstract: Three fiber micro displacement sensors can be combined to realize three-dimensional (3D) displacement sensing, but the system is complex. In this paper, a 3D displacement sensor based on fiber SPR was proposed, which was composed…
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Keywords:
micro displacement;
fiber spr;
fiber;
displacement ... See more keywords
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Published in 2025 at "Optics express"
DOI: 10.1364/oe.569240
Abstract: Fiber optic interferometric micro-displacement sensors face the challenge of simultaneously achieving a large detection range and high sensitivity. This article proposes a large detection range and high-sensitivity fiber optic interferometric micro-displacement sensor based on an…
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Keywords:
large detection;
detection range;
sensitivity;
micro displacement ... See more keywords
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Published in 2019 at "Applied Sciences"
DOI: 10.3390/app9122517
Abstract: The micro-displacement measurement system with 2D/3D has become increasingly important in the field of scientific research and technology application. In order to explore the application of an optical surface in micro-displacement measurement, a novel and…
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Keywords:
elliptical paraboloid;
micro displacement;
displacement measurement;
measurement ... See more keywords
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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13040518
Abstract: The flexure hinge is a kind of micro-displacement adjustment device with application prospects because of its high displacement resolution, positioning accuracy and repeatability. In this study, a micro-displacement worktable with four degrees of freedom (X→,…
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Keywords:
micro displacement;
displacement worktable;
displacement;
flexure hinges ... See more keywords