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Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-019-04384-5
Abstract: In this paper we have analyzed the influence of the membrane inherent residual stress along with its Young’s modulus for evaluating the characteristics of a capacitive micromachined ultrasonic transducer (CMUT) for medical imaging and sensor…
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Keywords:
mechanical system;
micro electro;
electro mechanical;
ultrasonic transducer ... See more keywords
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Published in 2020 at "Journal of Differential Equations"
DOI: 10.1016/j.jde.2020.05.041
Abstract: Abstract We study the structure of stationary solutions of a micro-electro mechanical system with fringing field. It is known that there is a positive critical value such that no stationary solutions exist for the applied…
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Keywords:
stationary solutions;
critical value;
micro electro;
structure stationary ... See more keywords
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Published in 2018 at "Journal of Materials Processing Technology"
DOI: 10.1016/j.jmatprotec.2018.03.012
Abstract: Abstract This study reports on the first patterning method based on micro-electro-discharge machining (μEDM) that uses microfluidic electrodes in a liquid form. This novel method is developed to address a variety of problems associated with…
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Keywords:
micro electro;
process;
discharge;
electro discharge ... See more keywords
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Published in 2018 at "Measurement"
DOI: 10.1016/j.measurement.2018.03.007
Abstract: Abstract An integrated micro solenoid fluxgate sensor with a Co-based amorphous core is presented in this work based on the Micro-Electro-Mechanical System (MEMS) technologies. As the advantage of miniaturization, the micro fluxgate sensor is found…
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Keywords:
noise analysis;
micro electro;
electro mechanical;
fluxgate sensor ... See more keywords
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Published in 2020 at "ACS sensors"
DOI: 10.1021/acssensors.0c00181
Abstract: Hydrocephalus (HCP) is a chronic neurological brain disorder caused by a malfunction of the cerebrospinal fluid (CSF) drainage mechanism in the brain. The current standard method to treat HCP is a shunt system. Unfortunately, the…
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Keywords:
printed mems;
system;
micro electro;
mems micro ... See more keywords
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Published in 2020 at "IEEE Access"
DOI: 10.1109/access.2020.3008332
Abstract: In this work, numerical techniques based on Shooting procedure, Relaxation scheme and Collocation technique have been used for recovering the profile of the membrane of a $1D$ electrostatic Micro-Electro-Mechanical-Systems (MEMS) device whose analytic model considers…
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Keywords:
tex math;
electrostatic micro;
membrane;
inline formula ... See more keywords
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Published in 2021 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2021.3081828
Abstract: The sensitivity and the selectivity are the most significant parameters of any sensor. In this paper, the effect of the coating (functionalization) thickness on the performance associated with the sensitivity of a Micro-Electro-Mechanical-Systems (MEMS) planar…
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Keywords:
functionalization;
functionalization thickness;
creatinine;
thickness ... See more keywords
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Published in 2022 at "Optics letters"
DOI: 10.1364/ol.474806
Abstract: Mode-division multiplexing (MDM) enables a large increase in the information-carrying capacity of an optical network. Recently, chip-scale MDM devices that can switch different mode orders to different output waveguides have been demonstrated. However, an important…
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Keywords:
micro electro;
phase matching;
mode conversion;
conversion ... See more keywords