Design and analysis of a new three-axis micro-gyroscope
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DOI: 10.1007/s00542-017-3488-4
Abstract: A new three-axis micro-gyroscope which directly integrates spatial triaxial angular velocities sensitive function in single structure chip is designed and analyzed in the paper. The entire structure consists of three main parts: the left and… read more here.
Keywords: axis micro; axis; new three; micro gyroscope ... See more keywords
Research on an Anchor Point Lever Beam Coupling Type Tuning Fork Micro-gyroscope
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DOI: 10.1007/s12541-020-00327-7
Abstract: This paper has designed an anchor point lever beam coupled tuning fork micro-gyroscope and tested its output performance. The tuning fork micro-gyro is designed to eliminate the output error caused by orthogonal coupling and in-phase-inverting… read more here.
Keywords: lever beam; micro gyroscope; fork micro; tuning fork ... See more keywords
Adaptive Fuzzy Sliding Mode Control for a Micro Gyroscope with Backstepping Controller
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DOI: 10.3390/mi11110968
Abstract: This paper developed an adaptive backstepping fuzzy sliding control (ABFSC) approach for a micro gyroscope. Based on backstepping design, an adaptive fuzzy sliding mode control was proposed to adjust the fuzzy parameters with self-learning ability… read more here.
Keywords: fuzzy sliding; sliding mode; control; mode control ... See more keywords
Design, Dynamics, and Optimization of a 3-DoF Nonlinear Micro-Gyroscope by Considering the Influence of the Coriolis Force
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DOI: 10.3390/mi13030393
Abstract: In this paper, we use the nonlinear hardening stiffness of drive mode deal with the contradiction between gain and bandwidth of the linear micro-gyroscope, to improve the bandwidth and gain in sense direction. Firstly, in… read more here.
Keywords: gain; nonlinear micro; micro gyroscope; gyroscope ... See more keywords
Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation
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DOI: 10.3390/mi14010211
Abstract: Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the system sensitivity performance. The Frequency modulation (FM) method is proposed as an ideal solution to solve the problem of environmental fluctuation stability.… read more here.
Keywords: sensitivity; nonlinearity; micro gyroscope; force nonlinearity ... See more keywords