Design, fabrication, and characterization of bridge-type micro-hotplates with an SU-8 supporting layer for a smart gas sensing system
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DOI: 10.1088/1361-6439/aa556b
Abstract: In this study, bridge-type micro-hotplates (MHP) with an SU-8 supporting layer were proposed for smart gas sensor applications. The proposed MHP consisted of a heating membrane with an area of 140 µm × 140 µm,… read more here.
Keywords: type micro; supporting layer; micro hotplates; gas ... See more keywords