High-Stability Quartz Resonant Accelerometer With Micro-Leverages
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DOI: 10.1109/jmems.2020.3036121
Abstract: This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of quartz accelerometer is centrally symmetrical, which comprises two double-ended… read more here.
Keywords: tex math; micro leverages; resonant accelerometer; inline formula ... See more keywords